Miniature Dry Floating Scroll Vacuum Pumps


Pumping speed of 2 to 100 l/min.

  • Patent protected Floating Scroll Technology
  • Uncontaminated flow
    • No contamination of the media due to oil-free operation
    • No tip seal or PTFE dust
  • Maintenance-free
    • No tip seal or diaphragm
  • High performance and long product life
  • Compact size and high level of gas tightness
  • Very quiet and low vibration
  • Can operate in any installed position
  • Startup against air or vacuum


For air, steam and other gas

  • Medical Devices
  • Analysis Techniques and Environment Protection
  • Laboratory Use
  • Chemical Process
  • Others
    • Disks and Chips Process
    • Microchips Production
    • Printing Technology
    • Backing Pump for turbopumps

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