Serving OEMs over the world we at Scroll Lab provide the semiconductor industry with reliable, efficient, low service cost and compact sized dry vacuum pumps which are used as a fore pump to turbo molecular pumps.We serve new processes and existing processes in this field.

Semiconductor Applications:

  • Lithography
  • Chemical vapor deposition
  • Etching
  • Physical vapor deposition
  • Metrology
  • Ion implantation
  • Diffusion

Our recommendation

SVF dry vacuum pumps are also used in processes for handling of gases that require the highest level of purity within the gas recovery process which is important in Semiconductor processes. We recommend using the SVF-100  dry vacuum pump or SVF-300 for such applications.


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