Rapid infrastructural growth has generated major demand for pumps in the electronics and semiconductor industries over the last few years, particularly to produce micro-electronics and computer chips. With revenues from dry vacuum pump sales predicted to reach over $3 billion, Scroll Labs is excited to innovate new products and improve existing processes to meet this growing demand.

We provide reliable, efficient, compact, and low maintenance dry vacuum pumps to OEMS across the world to be used as backup pumps for turbo-molecular or roots pumps in semiconductor applications and powder metallurgy vacuum sintering.

Semiconductor Applications:

·         Lithography

·         Chemical vapor deposition

·         Etching

·         Physical vapor deposition

·         Metrology

·         Ion implantation

·         Diffusion

Recommendation

SVF dry vacuum pumps are ideal for processes that demand the highest level of gas purity, such as those involved in semiconductor manufacturing. They ensure efficient gas recovery with minimal contamination. For such applications, we recommend using either the SVF-100, SVF-300 and SVF-400 dry vacuum pumps and SVFA and SVFB series pumping systems, depending on the specific process requirements.

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